SU8000 Ultra High Resolution Field Emission Scanning Electron
The SU8000 is the world’s first Ultra High Resolution SEM iwth a Triple Electron Detector system to collect, separate and/or mix secondary, high angle and low angle backscattered electron signals. Hitachi’s patented ExB energy filter system combined with beam deceleration technology improves images performance for both SE and BSE at accelerating voltages as low as 100V. Performance, ease of use and high reliability make the SU8000 a perfect fit for any microscopy facility.
Specifications
Resolution
1.0nm at 15kV 1.4nm at 1kV
Stage
Type I = 50mm x50mm; X and Y Type II = 110mm x 110mm; X and Y
