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Park SYSTEMS Research AFM XE-150 |
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XE-150
Premier Cross-Functional AFM with Motorized Sample Stage
With the arrival of the XE-150, Park Systems’s large sample AFM, Non-Contact AFM imaging has become the most feasible and practical way to scan your large samples with the ultimate AFM resolution and reliability. The XY motorized sample stage is optimized for large sample (150 mm × 150 mm) placement and allows full travel over the entire sample. - Supports up to 6 inch wafer
- 100 µm × 100 µm XY scan range
- Up to 25 µm Z scan range
- Enhanced acoustic enclosure
- Fully motorized XY stage travels entire 150 mm × 150 mm
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Features - High Resolution Digital CCD Camera with Digital Zoom
Direct on-axis resolution digital CCD with CCD zoom capability allows high clarity and high resolution image quality regardless of panning. - Super Luminescence Diode (SLD) Head
The low coherency of the Super Luminescence Diode (SLD) enables accurate imaging of highly reflective surfaces and precise measurements for pN Force-distance spectroscopy. An additional advantage of the SLD Head is its compatibility with experiments that utilize light in the visible region of the spectrum. - EZ Snap Probe Tip Exchange
Probe tip exchange is just a snap with a pre-aligned kinematic chip mounts that guarantee the position of the probe tip without requiring special tools or head removal. - 150mm Sample Vacuum Chuck
Supports sample size of up to 150 mm or 6 inch diameter. - 100μm × 100μm Flexure-based Closed-loop XY-Scanner
The single module parallel-kinematics XY-scanner has low inertia and minimal runout, providing the best orthogonality, high responsiveness, and axis-independent performance. With minimal coupling, hardware closed-loop position control allows for the absolute scaling of AFM measurements, attining 1.5 nm closed-loop lateral resolution. - Motorized XY Sample Stage
Fully motorized stage travels entire 150 × 150 mm. - Motorized Optics Stage
The focus mechanism for the on-axis optical microscope is motorized and software controlled. Note that the motorized focus flexibility is almost essential for working with transparent samples and liquid cell applications. - Dovetail Lock Head Mount
The AFM head, which includes the Z-scanner, is easily inserted or removed by sliding it along a dovetail rail and locking it into place with a convenient turn of two thumb locks. - 12μm Flexure-Guided High Force Z-scanner
For the Z-scanner, a high force multi-stack piezo enables a high speed 1-dimensional actuator, which moves the probe in the vertical direction.
Options - Head
- 25 μm Z Scanner Head
- Optical Head
- Hysitron TriboScope Adapter Head
- Liquid Cell
- Open Liquid Cell
- Universal Liquid Cell
- EC (Electro-Chemical) Cell
- Probe Hand
- Clip Type Probe Hand
- Liquid Probe Hands Type 1, 2, 3
- STM Probe Hands
- SCM Probe Hands
- Enviromental Control
- Heating & Cooling Stage
- Heating Stage for High Temperature Control
- Environmental Chamber (glove box)
- Humidity Control Symtem
- Water Pump & Temperature Controller
- Accessories
- SAM (Signal Access Module)
- Asoustic Enclosure
- Asoustic Foam Box
- Standard Asoustic Enclosure
- Enhanced Acoustic Enclosure with Steel Frames
Specification - Scanner
Decoupled XY and Z-scanner
Single module flexture XY-scanner with closed-loop control
Height sensing of Z-scanner
Scan range of XY-scanner :100μm
Working distance of Z-scanner : 12 μm or 25 μm - Stage
Working range of XY stage : 150 mm × 150 mm, manual precision movement
Working range of Z stage : 27.5 mm, motorized movement
Sample size : Up to 80 mm × 80 mm, 20 mm thick, and up to 500 g - Head
Detection of cantilever deflection
-Laser Diode (option): 650 nm
-Super Luminescent Diode (standard): 835 nm with low coherency
Optical Access Availability Option
-Accessible solid angle : 58° of cone angle
Raman spectroscopy on localized region (Raman AFM) - Optics
On-axis vision of sample surface and cantilever
Focus range : 20 mm, motorized and software controlled
Magnification : 780x (optional 160x, 390x, or 1500x)
Field of view : 480μm × 360μm
Optical resolution : 1μm - Electronics
High performance : 600 MHz with 4800 MIPS
Maximum image size : 16 data channels of 4096 × 4096 pixels
Signal inputs : 20 channels of 16 bit ADC at 500 kHz sampling
Signal outputs : 21 channels of 16 bit DAC at 500 kHz settling
Synchronous signal : End-of-image, end-of line, and end-of-pixel TTL signals
Active Q control (optional)
Cantilever spring constant calibration (optional) - Software
XEP
Dedicated system control and acquisition software
Adjusting feedback gain, set point, drive frequency/amplitude/phase in real time
Scrip-level control through external program such as LabVIEW (optional)
XEI
AFM data analysis software (running on Windows, MacOS X, and Linux) - Supported Modes
True Non-Contact Mode
Contact Mode
Lateral Force Microscopy
Force-distance Spectroscopy/F-d volume imaging
Phase imaging of true Non-Contact, FMM, MFM, EFM, and SCM
Conductive AFM
Scanning Tunneling Microscopy
Magnetic Force Microscopy
Electric Force Microscopy
Piezo-response Microscopy
Piezo-response Force Microscopy
Scanning Capacitance Microscopy
Scanning Thermal Microscopy
Nanolithography
Nanoindentation - Accessories
Electrockemistry AFM
Universal Liquid Cell with heating/cooling stage
Heating/Cooling sample stage
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